Sizing electrode and its effect on performance of a microactuator

  • Mohamed Ahmed ESHAG School of Electrical Engineering, Southwest Jiaotong University, Chengdu, 610031, Chin; School of Mechanical Engineering, Faculty of Engineering, Sudan University of Sciences and Technology, P.O. Box.407, Khartoum, Sudan; PLOP Department, Petro-Energy E&P Co. Ltd, PDOC & PE Tower, Alsunut Area, Almogran, Khartoum, Sudan
  • Musaab ZAROG Department of Mechanical and Industrial Engineering, College of Engineering, Sultan Qaboos University, P.O. Box 33, Al-Khod, Muscat, 123, Oman
Keywords: Electrode size, Finite element analysis, Cantilever


The vibration amplitude and its frequency are the main factors that affect the performance of resonating microactuators and microsensorson. Electrostatic and piezoelectric actuation/sensing are very common methods used to design Microelectromechanical Systems (MEMS). Both methods requires adding electrode layer for detection or actuation purposes which is normally vey small is dimension and therefore have low effect on the performance of MEMS device. In some cases, small shift in the vibration resonance frequency of the device or its amplitude of vibration can highly affect the device performance. This work investigates the effect of sizing electrode on the performance of electrostatically actuated MEMS device. Electrode length was varied from fully covering the actuator layer to covering 10% only. ANSYS finite element was used as a simulation tool.